![](https://www.muneda.com/wp-content/uploads/2022/07/document-IEEE.jpg)
Authors
U. Sobe, K.-H. Rooch, D. Mörtl, A. Graupner
A. Ripp, M. Pronath, MunEDA GmbH, Munich, Germany
Published in
May 2009, Semiconductor Manufacturing, IEEE Transactions on Semiconductor Manufacturing
Link
https://ieeexplore.ieee.org/document/4909528?isnumber=4909516&arnumber=4909528